Moteri yumuvuduko wa moteri 2CP3-68 1946725 kuri moteri ya Carter

Uburyo bwo gutegura sensor sensor, irangwa no gutera intambwe zikurikira:

S1, gutanga wafer hejuru yinyuma nubuso bwimbere; Gukora umurongo wa piezoresistive hamwe nu gice kinini cyo guhuza hejuru yimbere ya wafer; Gukora igitutu cyimbitse mukuzuza inyuma yinyuma ya wafer;

S2, guhuza urupapuro rushyigikira inyuma ya wafer;

S3, gukora ibyobo byayobora hamwe ninsinga zicyuma kuruhande rwimbere rwa wafer, no guhuza imirongo ya piezoresistive kugirango ikore ikiraro cya Wheatstone;

S4, kubitsa no gukora passivation layer hejuru yimbere ya wafer, no gufungura igice cya passivation kugirango ikore agace kicyuma. 2. Uburyo bwo gukora bwa sensororo yumuvuduko ukurikije ikirego cya 1, aho S1 igizwe nintambwe zikurikira: S11: gutanga wafer hamwe nubuso bwinyuma hamwe nubuso bwimbere, no gusobanura ubunini bwa firime yoroheje yumuvuduko kuri wafer; S12: gutera ion ikoreshwa hejuru yimbere ya wafer, imirongo ya piezoresistive ikorwa nuburyo bwo gukwirakwiza ubushyuhe bwo hejuru, kandi uturere twahuza twinshi cyane; S13: kubitsa no gukora urwego rukingira hejuru yimbere ya wafer; S14: gutobora no gukora umuvuduko ukabije winyuma inyuma ya wafer kugirango ukore firime yoroheje. 3. Uburyo bwo gukora bwa sensor yumuvuduko ukurikije ikirego 1, aho wafer ari SOI.

Mu 1962, Tufte n'abandi. Yakoze sensor yumuvuduko wa piezoresistive hamwe na silicon piezoresistive ikwirakwizwa hamwe na firime ya silicon yubatswe bwa mbere, maze itangira ubushakashatsi kubyerekeranye na sensor ya piezoresistive. Mu mpera z'imyaka ya za 1960 no mu ntangiriro ya za 70, kugaragara kw'ikoranabuhanga ritatu, ariryo tekinoroji ya silicon anisotropic etching, tekinoroji ya ion implantation na tekinoroji ya anodic, byazanye impinduka zikomeye ku cyuma gikoresha ingufu, cyagize uruhare runini mu kuzamura imikorere ya sensororo y'umuvuduko. . Kuva mu myaka ya za 1980, hamwe n’iterambere ry’ikoranabuhanga rya micromachining, nka anisotropic etching, lithography, diffusion doping, ion ion transplantation, bonding and coating, ingano ya sensor sensor yagabanutse, ibyiyumvo byateye imbere, kandi nibisohoka ni byinshi kandi imikorere ni nziza. Muri icyo gihe, iterambere no gushyira mu bikorwa tekinoroji nshya ya micromachining bituma firime yuburebure bwa sensor sensor igenzurwa neza.