Moteri yumuvuduko wa moteri 2CP3-68 1946725 kuri Carter excavator

Uburyo bwo gutegura igitutu igitutu, burangwa no gutungura intambwe zikurikira:

S1, gutanga umufeferi hamwe nubuso bwumugongo; Gukora umurongo wa Piezoresistive hamwe nubuture bwimiterere cyane kuri outhe imbere ya wafer; Gukora igitutu cyimbitse ukoresheje hejuru ya wafer;

S2, hunga urupapuro rwinkunga inyuma ya wafer;

S3, ifata umwobo uyobora hamwe niyinga yicyuma kuruhande rwa wafer, kandi uhuze imirongo ya piezoresistique kugirango ikore ikiraro cyingano;

S4, kubitsa no gukora urwego rwibihugu hejuru yimbere ya wafer, hanyuma ufungure igice cyiburayi kugirango ukore ibyuma bya padi. 2. Uburyo bwo gukora bwo gukora igitutu bwo gusaba 1, aho S1 igizwe nintambwe zikurikira: s1 S12: Gukamba kwa Ion bikoreshwa imbere yimbere ya Wafer, muri Piezoresistive yakozwe muburyo bwo kugabanya ubushyuhe bwinshi, kandi uturere tunyamahanga tujya dukora cyane; S13: Kubitsa no gukora urwego rukingira imbere ya wafer; S14: ETCHING no gukora igitutu cyimbitse inyuma ya wafer kugirango ugire film yoroshye. 3. Uburyo bwo gukora bwo gukora igitutu bwo gusaba 1, aho wafer ari Soi.

Mu 1962, Tufte et al. Yakozwe umuvuduko wumuvuduko wa Piezoresive hamwe na Disicoresisa ya Disinesites na Filime ya firime ya Silicon bwa mbere, itangira ubushakashatsi kuri sensoresites sensor. Mu mpera z'imyaka ya za 1960 na mu ntangiriro ya za 70, isura y'ikoranabuhanga itatu, ni ukuvuga ikoranabuhanga rya Silicon Anisontropique, Ikoranabuhanga rya Ion rivuga ko rifite uruhare runini mu kuzamura imikorere ya sensor. Kuva mu 1980, hamwe niterambere ryikoranabuhanga rya micromandyaning, nka anisotropic ething, lithigrafi, itandukaniro, ubunini bwumuvuduko, kandi ibisohoka ni byinshi kandi imikorere ni byiza. Muri icyo gihe, iterambere no gushyira mu bikorwa ikoranabuhanga rishya rya microromafsing rituma film yuzuye ibyuma bigenzurwa neza.