Bikoreshwa kuri Payet lisat isanzwe ya gari ya moshi ya gari ya moshi 06e906051k

1. Uburyo bwo gukora igitutu cyumuvuduko, bigize:

Gutanga urwego rwa semiconductor, aho umuganga wa mbere umaze interlayer, urwego rwambere rwa interlayer hamwe nimirire ya kabiri ya interlayer yashinzwe kuri semiconductor.

Isahani yo hepfo ya electrode mumikino ya mbere ya interlayer, hatukana bwa electrode ya mbere iherereye kuri kimwe cya electrode yo hepfo na spaced itandukanye.

Guhuza ibice;

Gukora urwego rwibitambo hejuru yisahani yo hepfo;

Gukora isahani yo hejuru ya electrode kumwanya wanyuma wa interlayer, urwego rwambere ruhuza kandi urwego rwibitambo;

Nyuma yo gukora urwego rwibitambo kandi mbere yo gukora isahani yo hejuru, murwego rwa mbere rwa interineti

Gushiraho indorerezi, kandi wuzuze indege ihuza hamwe nisahani yo hejuru kugirango uhuze numuyoboro wambere; Cyangwa,

Nyuma yo gukora isahani yo hejuru ya electrode, ihuza ibihingwa bikozwe muri plate yo hejuru ya electrode hamwe nuburyo bwa mbere bwo guhuza, ninde

Gukora urwego ruyobora ruhuza isahani yo hejuru ya electrode hamwe nuburyo bwa mbere muburyo bwo guhuza floove;

Nyuma yo guhuza amashanyarazi no kumurongo wambere uhuza, ukuyemo urwego rwibitambo kugirango ukore umwobo.

2. Uburyo bwo gukora igitutu ya sensoso hakurikijwe 1, aho mubice byambere

Uburyo bwo gukora urwego rwibitambo kumugenzi wa interlayer ugizwe nintambwe zikurikira:

Kubika urwego rwibitambo kumubano wambere wa interlayer;

Gushushanya urwego rwibitambo kugirango ukore urwego rwibitambo.

3. Uburyo bwo gukora sensor igitutu ukurikije ibirego 2, aho photolithorage kandi ikoresha ikoreshwa.

Ibikoresho byo gutamba bishushanyijeho inzira yo guhinduranya.

4. Uburyo bwo gukora sensor igitutu ukurikije ibisabwa 3, aho urwego rwibitambo

Ibikoresho ni karubone ya amorphous cyangwa ikidage.

5. Uburyo bwo gukora urutigitori dukurikije ibisabwa 4, aho urwego rwibitambo

Ibikoresho ni Arukoni ya Amurfuus;

ETCHING GASE ikoreshwa muburyo bwo kugashyiraho urwego rwibitambo harimo O2, CO, N2 na AR;

Ibipimo mubikorwa byo kugashyiraho urwego rwibitambo ni: Urutonde rwa O2 ni 18 sccm ~ 22 sccm, hamwe nigipimo cyuruzi cya co ni 10%.

Igipimo cyurugendo kiva kuri 90 sccm kugeza kuri 110 sccm, igipimo cyuruzi cya N2 kiva kuri 90 sccm kugeza 110 sccm, nigipimo cyuruzi rwa ar.

Intera ni 90 sccm ~ 110 sccm, uruhara rutondekanya ni 90 Mtor ~ 110 Mtor, kandi imbaraga zo kubogama ni

540w ~ 660w.