Imiterere ya piezoresistive

Muri iyi sensor, umurongo wo kurwanya winjijwe kuri monopragma ya monocrystalline vinocrystalline ya monofstarstarnine gahunda yo kwishyira hamwe kugirango dukore chip ya silicon pip yapakiwe neza mubishishwa byaciwe. Umuvuduko w'igitutu cya Piezoresistive, uzwi kandi nka sensor-leta ikomeye-agaragara mu buryo bworoshye, bukeneye kumva imbaraga zo hanze mu buryo butaziguye binyuze mu bintu byoroshye cyane, ariko yumva igitutu cyapimwe binyuze muri silicon diaphragm.

Uruhande rumwe rwa Diehicon Diaphragm ni umwobo wigituba kinini - igitutu kinini giganisha nigitutu cyapimwe, kandi kurundi ruhande ni umwobo wigituba mutumvikanaho. Mubisanzwe, diaphragm ya silicon yateguwe nkuruziga hamwe na peripheri yakosowe, kandi igipimo cya diamester kugeza kuri metero kare diaphragm.

Mubyongeyeho, hari kandi kare silicon diaphragm na sensor ya silicon. Sensind ya silicon nayo ikozwe mu mpande ziharanira kurwanya no gukwirakwizwa mu cyerekezo runaka cy'indege ya kirisiti ya silicon, hamwe n'imirongo ibiri yo guhangayikishwa n'imihangayiko igabanya umutima.

SENSORESITIVES ni igikoresho gishyirwaho no kurwanya ikwirakwizwa kumashusho yibikoresho bya semiconductor ukurikije ingaruka za piezoresuct yibikoresho bya semiconductor. Inkombe zayo zirashobora gukoreshwa muburyo bwo gupima, kandi kurwanya diffusion bihujwe muri substrate muburyo bwikiraro.

Iyo substrate ihinduwe nimbaraga zo hanze, indangagaciro zo kurwanya izahinduka kandi ikiraro kizatanga umusaruro uhuye nubwisanzure. Substrate (cyangwa diafragms) ikoreshwa nka seriveri ya piezoresisative cyane cyane wafer na pariki ya silicon na getiyumu. Seriveri ya silicon Picoresisative ikozwe muri Silicon mugihe cyo kwitondera cyane, cyane cyane sen-progaramu ya seczoresistive yo gupima igitutu numuvuduko nibyiciro byinshi.