Imiterere ya Piezoresistive Sensor

Muri iki cyuma, umurongo wa résistoriste uhujwe na diaphragm ya monocrystalline silicon diaphragm muburyo bwo kwishyira hamwe kugirango ikore chipic piezoresistive chip, kandi impande zose ziyi chip zapakiwe neza mugikonoshwa, hanyuma amashanyarazi ya electrode arasohoka. Umuvuduko ukabije wa Piezoresistive, uzwi kandi nka sensor ya reta ikomeye ya sensor, itandukanye na adhesive strain gauge, ikenera kumva imbaraga ziva hanze kuburyo butaziguye binyuze mubintu byoroshye byoroshye, ariko bikumva neza umuvuduko wapimwe ukoresheje diaphragm ya silicon.

Uruhande rumwe rwa diaphragm ya silicon numuyoboro mwinshi uvugana numuvuduko wapimwe, kurundi ruhande numuyoboro muke uvugana nikirere. Mubisanzwe, diaphragm ya silicon yateguwe nkuruziga rufite impande zose, kandi igipimo cya diameter nubugari ni nka 20 ~ 60. Imirongo ine yo kurwanya umwanda P ikwirakwizwa mugace ka diaphragm ya silicon izenguruka kandi igahuza ikiraro cyuzuye, bibiri muri byo. bari mukarere ka compressive stress naho izindi ebyiri ziri mukarere ka stress ihangayikishije, zisa neza kubijyanye na centre ya diafragma.

Mubyongeyeho, hariho na kare ya silicon diaphragm na sensor ya inkingi ya sensor. Rukuruzi ya silicon silindrike nayo ikozwe mumirongo irwanya ikwirakwizwa no mu cyerekezo runaka cyindege ya kirisiti ya silindiri ya silicon, hamwe nimirongo ibiri irwanya impagarara hamwe nibice bibiri birwanya guhagarika umutima bikora ikiraro cyuzuye.

Piezoresistive sensor nigikoresho cyakozwe no kurwanya ikwirakwizwa rya substrate yibikoresho bya semiconductor ukurikije ingaruka za piezoresistive yibikoresho bya semiconductor. Substrate yacyo irashobora gukoreshwa muburyo butaziguye nk'icyuma gipima, kandi kurwanya ikwirakwizwa bihujwe muri substrate muburyo bwikiraro.

Iyo substrate ihinduwe nimbaraga zo hanze, indangagaciro zo kurwanya zizahinduka kandi ikiraro kizabyara umusaruro utaringaniye. Substrates (cyangwa diaphragms) ikoreshwa nka sensor ya piezoresistive ni wafer ya silicon na wafer ya germanium. Ibyuma bya silicon piezoresistive bikozwe muri wafer ya silicon nkibikoresho byoroshye byakuruye abantu benshi, cyane cyane ibyuma bikomeye bya piezoresistive sensor yo gupima umuvuduko n'umuvuduko nibyo bikoreshwa cyane.