Umuvuduko ukabije wa Semiconductor usanzwe ukoresha n-ubwoko bwa silicon wafer nka substrate. Ubwa mbere, wafer wa silicon yakozwe muburyo bwo guhangayika bifatika hamwe na geometrie runaka. Mu gice cyo guhangayika cyo guhangayika cya Silicon wafer, abaturuka bakwirakwijwe bane p-Ubwoko, hanyuma ikiraro cy'urubuga rw'ingano kinyuranye, kandi ikiraro cy'amazi ane cy'ingano cyashinzwe hamwe n'abo barwanyi bane. Mubikorwa byingufu zo hanze, impinduka zo kurwanya indangagaciro zihinduka ibimenyetso byamashanyarazi. Ikiraro cy'Ingano gifite igitugu ni umutima wa sensor w'igitutu, mubisanzwe bita ikiraro cya piezoresistesite (nkuko bigaragara ku gishushanyo 1). Ibiranga ikiraro cya piezoresistique ni ibi bikurikira: ① Indangagaciro zo kurwanya amaboko ane yikiraro angana (byose r0); ② Ingaruka ya Piezorestive yintwaro zegeranye zikiraro zingana nagaciro kandi zinyuranye mubimenyetso; ③ Ubushyuhe bwubushyuhe bwamaboko ane yikiraro ni kimwe, kandi burigihe ku bushyuhe bumwe. Ku gishushanyo. 1, r0 ni agaciro ko kurwanya nta guhangayikishwa n'ubushyuhe bwicyumba; RT ni impinduka ziterwa nubushyuhe butanga ubushyuhe (α) iyo ubushyuhe buhindutse; P rδ ni uguhindura kwatewe no gukandagira (ε); Ibisohoka Voltage yikiraro ni u = i0 Δ rδ = i0rgΔ (ikiraro gihoraho cyubu).

Aho i0 ihoraho iriho ubungubu kandi e ni voltage yinkomoko ya voltage. Ibisohoka voltage yikiraro cya piezoresistisal igereranya itaziguye kubangamira (ε) kandi ntaho ihuriye na RT iterwa nubushyuhe, bugabanya cyane ubushyuhe bwa sensor. Igitutu cyakoreshejwe cyane cyumuvuduko wa Semiconductor ni sensor yo gutahura igitutu cyamazi. Imiterere yayo nyamukuru ni capsule ikozwe muri monocrystalline silicon (nkuko bigaragara ku gishushanyo cya 2). Diaphragm ikozwe mu gikombe, kandi hepfo yikikombe nigice gifite imbaraga zo hanze, kandi ikiraro cyigitutu gikozwe hepfo yikikombe. Impeta yimpeta ikozwe muri silicon imwe ya kirisiti imwe, hanyuma diafragm ifitanye isano nindero. Ubu bwoko bwikibazo cyumuvuduko ufite ibyiza byo kwiyumvisha ibintu byinshi, ingano ntoya nubunini, kandi byakoreshejwe cyane muri indege, kugendagenda kwabo, ibikoresho byo kwikorera hamwe nibikoresho byubuvuzi.