Ubusanzwe ikoreshwa rya semiconductor sensor ikoresha N-silicon wafer nka substrate.Ubwa mbere, wafer ya silicon ikozwe mubice byoroshye guhangayikishwa na geometrie runaka.Ku gice cyihangayikishije igice cya silicon wafer, ibyuma bine byo mu bwoko bwa P byo gukwirakwizwa bikozwe mu byerekezo bitandukanye bya kirisiti, hanyuma hakorwa ikiraro cy'amaboko ane ya Wheatstone hamwe na bine birwanya.Mubikorwa byimbaraga zo hanze, impinduka zindangagaciro zo kurwanya ziba ibimenyetso byamashanyarazi.Iki kiraro cy ingano gifite ingaruka zumuvuduko numutima wumuvuduko wumuvuduko, ubusanzwe witwa ikiraro cya piezoresistive (nkuko bigaragara ku gishushanyo 1).Ibiranga ikiraro cya piezoresistive nibi bikurikira: values ​​indangagaciro zo kurwanya amaboko ane yikiraro zingana (zose r0);Effect Ingaruka ya piezoresistive yamaboko yegeranye yikiraro angana agaciro kandi bitandukanye nibimenyetso;Co Ubushyuhe bwo kurwanya ubushyuhe bwamaboko ane yikiraro burasa, kandi burigihe burigihe ubushyuhe bumwe.Imitini.1, R0 nigiciro cyo kurwanya nta guhangayikishwa nubushyuhe bwicyumba;RT nimpinduka iterwa nubushuhe bwubushyuhe bwo guhangana (α) iyo ubushyuhe buhindutse;Δ Rδ ni ihinduka ryurwanya riterwa no kunanirwa (ε);Ibisohoka voltage yikiraro ni u = I0 Δ Rδ = I0RGδ (ikiraro gihoraho isoko).

Aho I0 ihora ituruka kumasoko agezweho na e ihoraho ya voltage isoko ya voltage.Umuvuduko w'amashanyarazi w'ikiraro cya piezoresistive uhwanye neza na neza (ε) kandi ntaho uhuriye na RT uterwa na coefficient de coiffure yo kurwanya, igabanya cyane ubushyuhe bwubushyuhe bwa sensor.Ikoreshwa rya semiconductor ikoreshwa cyane ni sensor yo kumenya umuvuduko wamazi.Imiterere yacyo nyamukuru ni capsule ikozwe muri silicon monocrystalline (nkuko bigaragara ku gishushanyo 2).Diaphragm ikozwe mu gikombe, naho hepfo yigikombe nigice gifite imbaraga zo hanze, kandi ikiraro cyumuvuduko gikozwe munsi yigikombe.Impeta yimpeta ikozwe mubintu bimwe bya silikoni imwe ya kirisiti, hanyuma diafragma ihuzwa na pase.Ubu bwoko bwa sensor sensor ifite ibyiza byo kwiyumvamo ibintu byinshi, ingano ntoya nubukomezi, kandi yakoreshejwe cyane mubyindege, kugendagenda mu kirere, ibikoresho byikora nibikoresho byubuvuzi.